Equipment

Timing of use

Examples of impacts on production and equipment

Equipment features/specifications

Thermal Control Unit, TCU

Specifications
  • Class of cleanliness control: ISO Class 1
  • Temperature control accuracy: ±0.1℃ to ±0.01℃
  • Humidity control accuracy: ±2%RH to ±1%RH
  • Built-in data of temperature and humidity curve lines
  • Warning, remote monitoring, and auto protection
Function/Benefit
  • Provide precise temperature and humidity control for the panel industry, wafer factories, and assembly factories to ensure the yield rate of manufacturing processes of mask aligner, development equipment, coating equipment, etc.
Application
  • By industry
    • Flat Panel Display (FPD)
    • Semiconductor manufacturing
    • Precision machinery processing
    • Precision measurement
    • Academic research
  • By supply chain
    • Panel manufacturing
    • Color filter
    • Assembly and test
    • Wafer manufacturing
  • By application in manufacturing process
    • Photo resistor coating
    • Mask and development
    • Pane/Len polishing
    • Laser processing
    • Measurement of geometric dimensions


Air Filter Unit, AFU

Specifications
  • Class of cleanliness: ISO Class 1
  • Warning signal upload: The AFU can be connected with equipment used in manufacturing.
Function/Benefit
  • Control the cleanliness in the key areas of the manufacturing environment. Split-type design that prevent manufacturing equipment from being affected by vibration.
Application
  • The manufacturing industry
    • Semiconductor
    • Panel manufacturing
    • IC assembly
    • Traditional industry
  • Clean environment
    • Pharmaceutical factory
    • Bio-tech industry
    • Hospital/Operating room/Ward


Thermal AMC Unit, TAU

Specifications
  • Cleanliness control: ISO Class 10
  • Temperature control accuracy: ±0.5℃ to ±0.3℃
  • Humidity control accuracy: ±5%RH to ±3%RH
  • Removal of gaseous particulate contaminants: Removal >80% in Main AMC; built-in temperature and humidity curve lines and alarming, remote monitoring, and auto protection functions.
Function/Benefit
  • Prevent lens of mask equipment from hazing to prolong service life.
  • Prolong service life of lamps of mask equipment.
  • Ramp up production yield rate and service life.
  • Prevent chemical contaminants from corroding machines internal components.
Application
  • By industry
    • Flat Panel Display (FPD)
    • Semiconductor manufacturing
  • By supply chain
    • Panel manufacturing
    • Color filter
    • Assembly and test
    • Wafer manufacturing
  • By application in manufacturing process
    • Photo resistor coating
    • Mask and development
    • Prevent lens of mask equipment from hazing


Hazing prevention unit, HPU

Protection area
  • External air inlet to mask aligner
  • Mask aligner lightbox
Cleanliness control
  • Class 10~1000/ISO Class 4~7
Removal of gaseous particle contaminants
  • NH3
  • Acid
  • TOC
Model HPU HPU+
Air Volume 50/100/150 m3/min 50/100/150 m3/min
AMC removing AMC Chemical Filter Chemical Filter
Air Condition By Clean Room 23 ± 0.5 ℃


Solvent Recycle Unit, SRU

  • During the coating process, the coating nozzle needs to be washed constantly. We use the gas of coater VCD exhaust and collect and store the solvent in the solvent tank by using a heat exchanger and purifying device. The purified solvent will be sprayed onto the nozzle to clean it.

indoor AIR Quality,iAQ

Suitable environment

  • Offices of government agencies
  • Schools
  • Banks
  • Medical institution
  • Libraries, museums, art galleries, performance halls, exhibition halls
  • Public transportation: Airports, railway stations, subway/metro stations
  • Movie theaters, audiovisual venues, KTVs
  • Department stores, hypermarts

Detection items

Measuring air factor Temperature Humidity CO2 CO PM2.5 PM10 TVOC HCHO
Detection range -40~125 ℃ 0~100% RH 400~2,000 ppm 0~1,000 ppm 0~500 μg/m³ 0~500 μg/m³ 0.13~2.5 ppm 0.00~5.00 ppm
Resolution 0.1 ℃ 0.1%RH 1 ppm 1 ppm 1 μg/m³ 1 μg/m³ 0.01 ppm 0.01 ppm
Detection means MEM chip NDIR Electrochemistry Optics Optics MEM chip Electrochemistry
Reaction time < 30s < 30s < 120s < 30s < 10s < 10s < 10s < 10s
Power on < 60s < 300s
Sampling Real-time
Interface WiFi (optional)/BLE4.0 (optional)/RS485 (Modbus-RTU) (optional)
Power DC 5V/ 1.0A or DC 12 to 24V/0.5A
Operation environment 0 ℃ to 50 ℃, below 90% RH
Dimension 18mm (l) X 115mm (w) X 32mm (h)

Features

  • Sensors can be mounted on walls. Small and simple design.
  • Special hardware airflow design that can effectively real time detect the air quality in the environment.
  • Sensors of the product employ MIT’s professional algorithm and are professional calibrated before shipping.
  • The communications interface is equipped with WiFi, BLE4.0 (optional), and RS485 port (optional).
  • Storage can store six months’ data.
  • The smart platform can easily record, analyze, and store collected air data, issue warning, and activate AC equipment (optional).

Integration framework

The role of the monitoring mainframe

  • Collect iAQ measuring statistics and sensor data.
  • Measure, arrange, and compare statistics.
  • Conduct real-time inspection and issue warning.
  • AI controlling equipment.

Benefits of establishing iAQ

  • Initiative to promote corporate responsibility
  • Energy saving, carbon reduction, and sustainable environmental protection
  • Quality air condition and better health
  • Quality air condition and enhanced work efficiency
  • 24-hour sensing and transparent data analysis
  • 24-hour warning for fire or CO leakage
  • 24-hour control and actuation of circuit