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村田機械株式會社 L&A事業部 (日本)

Murata Machinery, Ltd. /Logistics and Automation Division
(半導體廠/LCD廠用 全廠自動化搬送系統)

LCD Manufacturing

Clean Depot Systems

Supports transport for 8th generation glass, and warehouse clean degree of up to 0.1 Class.

Rail Guided Vehicles (RGV)

Simple configuration, high-speed operation, and high-speed transfer with high reliability.

Murata AMHS Control System (MACS)

Host computer (MACS) issues the commands to each conveyance device and controls and monitors the status of these devices.

Semiconductor Manufacturing

Clean Depot Systems

Facilitates efficient storage within the Clean room. Storage and retrieval commands are automatically issued for transport equipment in the Inter/Intra Bay and to operators in the clean room area.

Intra-bay Automated Overhead Traveling Vehicles

Helps shorten transportation lead times.
Effectively utilizes ceiling space and reduces factory footprint.

Inter-bay Automated Overhead Traveling Vehicles

Transportation of large quantities of in-process items between depots.

Murata AMHS Control System (MACS)

Host computer (MACS) issues the commands to each conveyance device and controls and monitors the status of these devices.

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株式會社Meikikou (日本) Meikikou Corp.

(LCD廠用 Robot,Loader/Unloader, Cassette Station)

提供半導體(semiconductor)及平面顯示器(FPD)用Clean Robot (for G3~G5)

提供半導體(semiconductor)及平面顯示器(FPD)用Clean Robot (for G3~G5)
Cassette Station

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亞邦國際科技股份有限公司(Unison) (台灣)

(半導體廠/LCD廠用 RF-ID Solution,N2 Purge Solution)
(CIM 自動化系統整合服務及CIM軟體開發)
為亞邦科技取得的科技公司，生產開發 RFID及相關整合產品及半導體用氮氣填充器，並提供工廠自動化整合服務及自動化軟體的開發

RFID:

  1. RF Transmit Frequency :134.2KHz
  2. TIR Solution compliance
  3. Communication Protocol :SECSI/II ,ASCII,HSMS
  4. Configurable device ID (DIP)
  5. Proven system have been installed in worldwide
  6. semiconductor FABs
  7. Multi Antenna Solution and RS485 interface
  8. TI Solution compliance Solution
  9. Plug and Play solution with variety of
  10. antenna size for the major
  11. Front Load vendors
  12. External Power Adapter 120/240V
  13. 50/60 Hz DC 24V voltage input

Application:

  1. Multi-Head RFID with Long -Antenna Cable
  2. WIP-Rack solution for carrier management

134.2 K Hz RFID Specification

13.56 M Hz RFID Specification

WIP-Rack Solution

　

N2 Purge :

  1. ODM for EntegrisR
  2. Support multi product :Entegris A300, F300, Reticle POD, SEP, E200, etc.
  3. Pre-Purge function for anti particle
  4. Capability of all 300mm Foup Development
  5. Reticle POD A300, F300, SEP, E200, Reticle
  6. Both stand-alone and integrated solution
  7. Programmable purge settings
  8. E84 compatibility
  9. RF ID compatibility

N2 purge Solution

　

　

E84 Emulator:

  1. Dual Mode Function (Remote Testing / Local Testing)
  2. With Testing log
  3. Load / Unload testing capability
  4. E84 compliance
  5. Support un-continue testing for each timeout
  6. Configurable timeout setting
  7. Visible handoff signal

E84 Emulator Introduction

　

View Station :

  1. Read RFID
  2. Host communication
  3. WIP rack application

　

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Active Technologies (義大利)

(半導體廠用 Wafer / Cell /Flash IC tester )
　

Active Technologies is a supplier of innovative and avant-garde Automated Test Equipment and electronic instrumentation to European and Middle East semiconductor company leaders.
　     RIFLE
    1.Best cost / performance ratio available on the market
    2.Most extensive built-in functionality
    3.True interactive testing
    4.Easiest test program development
    5.Highest analog performance (waveform generation, current measurement)
    6.Most comprehensive data processing toolset

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NIPPEI TOYAMA CORP. (日本)

(太陽能 Wafer cuttimg)

　

Design, manufacture, and sales of transfer machines, exclusive-purpose machines, grinding machines, machining centers, laser cutting machines, and semiconductor manufacturing equipment, etc.

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SUN-S Co.,Ltd.(日本)

(全自動高速 Flash Memory 燒錄測試器)
　 hrough our integrated production system from design to manufacture, we offer products and services at any stage of production. We fulfill customer�fs needs by our technology and production know-how built up during our history.

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TIBCO Software Inc. (美國)

(企業即時應用整合方案)
  • Packaged Integration:TIBCO BusinessWorks
  • Message Product:TIBCO Rendezvous (RV)
  • ActivePortal Products:TIBCO PortalBuilder,TIBCO PortalPacks

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BISTel Inc.(韓國)

(半導體廠/LCD廠用, EES, Equipment Engineering System Suit Provider)

　

　

1. EES Solution, ,Equipment engineering System. We provide

　
  • Automation: (eExecuter)
    • Data Collection
    • Equipment Interface
    • Equipment Manager
    • MES Interface
    • MCS Interface
  • Process:( ePCM/eRMS /APC Adapter/R2R/eSPC)
    • Recipe Management
    • Fault Detection
    • Fault Classification
    • Run-to-run Control
    • Process Monitoring
    • SPC
  • Performance:( eMPA/ePMM)
    • Health Monitoring
    • Performance Measuring (E10, E58, E79)
    • EQP Performance Tracking (E116)
    • Maintenance Mgt
　 2. eService Solution,eService in Manufacture industry.

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AIM Systems Inc.(韓國)

(半導體廠/LCD廠用, IT, Automation System, CIM Solution)

　

　
　
  1. Factory Operation

    The most basic products for the production of semiconductor/TFT-LCD factory
    • nanoTrack (Advanced MES)
    • nanoScheduler (Job Scheduler)
    • nanoCMMS (EQP Maintenance Management)
  2. Process EQP Control

    Automation of manufacturing equipment for semiconductor/TFT-LCD factory and product group
    necessary for FAB integration
    • nanoMC (EQP Control Framework)
    • nanoITC (Integrated Tool Controller)

  3. Process Control

    Products necessary for increased production for semiconductor/TFT-LCD factory

    • nanoAPC (FDC, R2R, SPC)
    • nanoRMS (Recipe Management System)

  4. Equipment Connectivity

    Products in protocol transformer device for factory integration of manufacturing equipments of semiconductor/TFT-LCD
    • Egateway (SECS Protocol Converter)
    • Eportal (Integrated Equipment Portal Device)
    • SEComEnabler (Equipment Interface Dev. Tool)

  5. System Monitoring

    Products for limitless variety of monitoring and controller products in semiconductor/TFT-LCD factory operation
    • Evisor (SMS for Equipment Interface System)
    • FABview (SMS for FAB Monitoring & Control)

  6. Transportation Control

    Products for limitless variety of monitoring and controller products in semiconductor/TFT-LCD factory operation
    • nanoTrans (Material Control System)

 

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